top of page

 

Current research

 

The lab activities are in nano- and micro-opto-electromechanical systems (NOEMS/MOEMS). We model, manufacture and apply new NOEMS- and MOEMS-based devices and test them in applications as surface-defined material sensors, fast switching devices and miniature imaging systems. We also aim at new bio-compatible materials with NOEMS/MOEMS functions.

 

 

Past research

 

 

Mass sensing (liquid)

 

Stress sensing (gas)

We have performed in situ real time frequency domain mass sensing of deposited liquid volatile droplets and sprays using plate-like microstructures, with robust and reusable performance attained over harsh conditions andmultiple cycles of operation.  Read More...

We performed sensing of chemical vapors from the atmosphere using critically buckled polycrystalline silicon doubly clamped mechanical resonators coated on one side with polymethyl methacrylate (PMMA). Our method of sensing is based on stress-induced resonance frequency shifts through volumetric swelling. Read More...

 

Stroboscopic high frequency modal imaging 

Synchronous imaging was used for the dynamic space-domain studies of vibration profiles in capacitively driven, thin n-doped polysilicon microbridges oscillating at rf frequencies. Fast and high-resolution actuation profile measurements of micromachined resonators are useful when significant device nonlinearities are present. Read More...

bottom of page